Development of sensor elements based on composite metal-oxide thin films and nanostructures
KП-06-Н87/8
The main objective of the present project is:
Fabrication of metal oxide composite thin films and nanostructures for low-concentration gas detection operating at room temperature. The sensor elements will be created using physical deposition methods such as pulsed laser deposition and magnetron sputtering, as well as their combined application.
Specific tasks of the project:
⇒ To form composite thin layers and/or nanostructures based on well-known semiconductor metal oxides (ZnO, TiO2, SnO2, WO3 и др.) by applying pulsed laser deposition in air (with short and ultrashort laser pulses), magnetron sputtering and the combined application of both methods.
⇒ To study the morphology, structure and chemical composition of the obtained thin films or nanostructures from mixed metal oxides.
⇒ To conduct tests to determine the sensor behavior of the investigated thin films or nanostructures when exposed to different gas components.
⇒ Based on the obtained results of the characterization and experiments to determine the sensory behavior of the various nanostructures of mixed metal oxides, to optimize their synthesis conditions (the synthesis method used and the specific process parameters).